We offer ZnO base target£¬including AZO, GZO, GAZO. The following table show the comparison of these targets.
Product Specification :
| Disposition Rate | ||
| Sputtering condition: 0.3Pa, Ar100£¥, T-S=60mm, Ts=RT & 200℃, DC=300W | ||
| Product Type | Disposition Rate (nm/min) | |
| RT | 200℃ | |
| AZO | 83.7 | 75.7 |
| GAZO | 90.4 | 81.9 |
| GZO | 101.3 | 91.4 |
| Optical Properties & Resistance | |||||
| Thin films (200nm) deposited without heating Sputtering condition: 0.3Pa, Ar100£¥, T-S=60mm, Ts=RT & 200℃, DC=300W |
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| Content | Ga2O3 (wt£¥) |
Al2O3 (wt£¥) |
Sheet Resistance (Ω/Sq2) |
Thickness (nm) |
Resistivity (μΩcm) |
| 5.7 GZO | 5.70 | 0.00 | 34.8 | 201.9 | 703 |
| 0.5 GZO | 0.50 | 0.00 | 137.5 | 194.7 | 2680 |
| 2 AZO | 0.00 | 2.00 | 44.7 | 201.6 | 902 |
| High GAZO | 2027 | 1.23 | 36.4 | 214.5 | 781 |
| Low GAZO | 0.27 | 76.2 | 76.2 | 200.1 | 1520 |
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